WebFeb 27, 2024 · Since CCTBA Co-003 decomposes at 101°C and dicobalt octacarbonyl Co-001 loses CO at room T, it is surmised that the growth mechanisms involve a significant CVD component 60 A review article of: thermal ALD of Co(iPrNCMeNiPr) 2 (Co-206) with H 2 as co-reactant to yield Co @ 350°C with the very low growth rate of 0.012nm/cycle, … WebJun 27, 2024 · The performance of a bubbler to deliver the low-volatility, liquid cobalt precursor μ2-η2-(tBu-acetylene) dicobalthexacarbonyl (CCTBA) for reduced-pressure chemical vapor deposition and atomic layer deposition processes was characterized. A relatively large process window was investigated by varying carrier gas flow rate, system …
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WebNov 25, 2014 · CCTBA was heated up to 50 °C and fed into the chamber without introducing a carrier gas. To check the ALD window of CCTBA, Co films were deposited at different temperatures ranging from 100 to 250 °C. WebA cobalt deposition process, including: volatilizing a cobalt precursor selected from among CCTBA, CCTMSA, and CCBTMSA, to form a precursor vapor; and contacting the precursor vapor with a substrate under vapor deposition conditions effective for depositing on the substrate (i) high purity, low resistivity cobalt or (ii) cobalt that is annealable … red cross disaster fund nz
Characterization of bubbler performance for low-volatility liquid ...
WebFind cctba and related products for scientific research at MilliporeSigma. US EN. Applications Products Services Support. Advanced Search. Structure Search. Search Within. Products Technical Documents Site Content Papers Genes Chromatograms. Available for Sale. United States Globally. Products Genes Papers Technical Documents … WebJun 27, 2024 · The performance of a bubbler to deliver the low-volatility, liquid cobalt precursor μ 2-η 2-(t Bu-acetylene) dicobalthexacarbonyl (CCTBA) for reduced-pressure … WebJan 19, 2024 · (3,3-Dimethyl-1-butyne)dicobalt hexacarbonyl CCTBA Co2 (CO)6 [HC≡C (C (CH3)3)] – Ereztech (3,3-Dimethyl-1-butyne)dicobalt hexacarbonyl Synonym: … red cross disaster payment